Research On Plasma Absorption Probe Diagnostic Device

low-temperature plasma technology achieves increasingly wide application in the industry.As the developing of the application, diagnostic techniques of low-temperature plasma has received more and more attention.There're various diagnostic methods of low-temperature plasma,in which some tranditonal ones,for instance Langmuir probe diagnostic method,have been still used .But as the increasing of technological requirements and accuracy ceaselessly,some tranditional diagnostic methods can't obtain expectant effect in the industry.Therefore,this paper mainly describes a new diagnostic method——Plasma Absorption Probe.Plasma Absorption Probe diagnostic technique develops for relying on the principle of the resonant absorption of surface waves.In this paper,the Plasma Absorption Probe diagnostic technique is elaborated in three aspects,such as deducing of theoretical model, analogue simulation and putting experiment in effect.In the theoretical model, the performing region of Plasma Absorption Probe is devided into several parts, according to the structure of Plasma Absorption Probe,and the individual electromagnetic theory analysis of the Plasma Absorption Probe's performing regions has been deduced ,then the dispersion relations of the surface wave are gived separately.Through the analysis of the factors influencing the probe's diagnosis,it can be concluded that the antenna area resonator is the critical part in surface wave resonace,following it has been proved through the analogue simulation and experiment.Based on the relation of surface waves's resonance frequency:ω_pe =ω_SW·(1 +ε)d)^1/2,the electron density of plasma has been obtained through a series of resonant absorptions'measuring. The diagnostic method has been applied to radio-frequency discharge plasma.The advice of improving the diagnostic device is gived at last of the paper,it would be refer for the mext phase of work on developing this diagnostic method.