| The protruding photovoltaic industry has become focus industry of the worldwith the deterioration of environment and energy crisis. silicon-based thin filmsolar cells become a research focus due to its low-cost and the transparentconductive oxide electrode of it has become more and more important. ZnO filmhas been seen as the most promising material due to its abundant raw materials,low cost, stability in hydrogen plasma environment and simple preparation process.In addition, flexible underlayer solar cell as a new kind of thin film solar cells,draw more and more attention.Firstly, twin DC magnetron sputtering process on the target which has ZGOceramic target was optimized by orthogonal experimental design. Thepolycrystalline hexagonal structure ZGO film, which has preferred orientation of(002), c-axis perpendicular to the substrate, high transmission and low resistance,was prepared.Secondly, the influence of different heat treatment on the performance ofZGO film was studied. The excellent prepared ZGO film was heat treated in thefast annealing furnace in different atmosphere and different temperatures. It isfound that the crystal structure and the transmission of ZGO film was improvedand the resistivity changes little with the rise of temperature, the influence of N2and Ar2 atmosphere on the properties of thin films were similar.Finally, the ZGO film and the heat treated ZGO film affect on the amorphoussilicon thin film solar cells were compared. It is found that the conversionefficiency of amorphous silicon thin-film batteries was enhanced by the improved transmission of the heat treated ZGO film.In addition, in order to improve the performance of amorphous silicon thinfilm solar cells, the influence of ZGO films with different thickness on amorphoussilicon thin film solar cells with flexible PEN substrate. It can be seen thatamorphous silicon thin film solar cells can be optimized when the ZGO filmthickness is 750nm. |
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