Quartz Micromachined Vibratory Gyroscope Film Related Technologies

Quartz micromechanical vibration gyroscope is developed, which is based on the inertia technology and the micromechanical technology. The key technology for gyroscope is that the vibration part are processed by using of microelectronic technology. The advantage of gyroscope is small size,light weight,high reliability and suitable mass production. Moreover quartz gyroscope has been successfully applied to minitype GPS system. The development trend of quartz micromechanical vibration gyroscope is miniaturization and high-precision and low-cost in order to satisfy requirements of market.The gyroscope chip is the key part of quartz micromechanical vibration gyroscope. Q value,frequency difference and bias are important parameter of gyroscope chip.These parameter restrict mass production of gyroscope.The process of making gyroscope chip include substrate coating film,lithography, etching, side coating film, assembly and so on.Every process is very important for makin gyroscope chip and the coating film process is the key procedure.In this thesis,the principe of operation and the theory of microcosmic of quartz micromechanical gyroscope are studied. The layout of electrode and the dimension of film on the top,back and side of gyroscope chip are rationality designed by analyzed studying. Then the technology of coating film of quartz micromenchanical gyroscope is studied further. The uniformity and adhesive force of film of gyroscope chip are introduced. Finally, study on the effect relationship between the parameter of frequency difference,bias of gyroscope chip and the layout of electrode on tuning fork,wdith of film by making two side coating film experiment.