| With the developing of science, the circuit and the device will become more and more integrated, small and thin. As a style of thin film material, dielectric thin film is widely used. Right now, the dielectric thin film is used in the microwave frequency. So it is important to measure the complex permittivity of the dielectric thin film precisely in the microwave frequency, which could be much helpful for the development of the new thin film material, microelectronic device and the design of the circuit.In this paper the measurement technique of the dielectric thin film is systemic researched. The main research work includes:1. By the analysis of the correlative measurement technology home and abroad, the coplanar waveguide (CPW) structure measurement is established. Several types of CPW which proposed in the measurement are analysized by conformal mapping method.2. According to the theory of resonance, a relationship between the complex permittivity of the clamping fixture and the measurement parameters is established. We also establish the resonance measurement system which consists of the vector network analysis machine,transformer,test circuit,coupling apparatus,pressure apparatus,fixed apparatus and the controlling computer. In the frequency range of 1GHz to 4GHz, several dielectric thin films are measured by using the measurement system.3. According to the theory of transmission, a relationship between the complex permittivity of the clamping fixture and the scatting matrix is established by a new deembedding method. Then the transmission test system consisting of vector network analysis machine, connecting apparatus and the test fixture is established. Finally, we made a simulation of the transmission measurement.The results of the resonance measurement show that the resonance theory we analyzed is correct and accurate .Besides, the results of the transmission simulation show that the theory of the transmission measurement is correct and accurate. |
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