Dry Ice Particles Jetting Cleaning And Polishing The Ito Glass

ITO glass is an important component of liquid crystal display (LCD) and organic light-emitting diode (OLED), and the cleanliness of ITO glass surface has a remarkable impact on the performance of these devices. With the increasing focus on energy and environment protection, the traditional cleaning techniques can not meet the requirements. As a novel precise cleaning technique, carbon dioxide snow jet spray exhibits high effectiveness in electronic devices and materials. It has the advantages of excellent cleaning function, no use of water and chemicals, no introduction of second contamination, not being toxic, and no adverse effect on human body, etc. Thus, it is of important application significance to apply this techique in the cleaning process of ITO glass.The carbon dioxide snow jet spray cleaning relevant research and theory were introduced in this paper. The orthogonal experiment was designed, and some main factors affected the quality of substrate cleaning were invested, such as the spray angle, spray distance and spray time and so on. Moreover, the cleansing effects were compared with the low-frequency ultrasonic cleaning. Research showed that after ultrasonic cleaning and carbon dioxide snow jet spray cleaning significantly reduced the contact angle of the sample surface and enhanced surface energy than uncleaned sample. The wettability had better effect than ultrasonic cleaning. Through fixed reduction ratio (FRR) model of the surface elements in a quantitative analysis, carbon dioxide snow jet spray can effectively reduce the carbon content of the surface of ITO. Through further analysis of C1s and O1s fine spectrum of the samples, carbon dioxide snow jet spray reduced surface contamination of carbon and oxygen of COOH state, thereby effectively reduced the organic pollutants on the surface and improved the ITO glass surface cleanliness. Furthermore, statistical analysis of residue particles on the surface was carried out. Compared with low-frequency ultrasound method, carbon dioxide snow jet spray can effectively remove surface contamination particles. Furthermore, the influence of surface cleaning of ITO electrodes on characteristics of OLED was studied.The device treated by carbon dioxide snow jet spray had the improvenment in turn-on voltage and electroluminescence luminance.Carbon dioxide snow jet spray for polishing ITO glass was also studied in this paper. Research showed that carbon dioxide snow jet spray reduced roughness of ITO surface, and with the time growth, roughness showed a downward trend.