Millimeter-wave Mems Switches And Mems Phase Shifter

Nowadays, RF MEMS technology becomes more and more attractive In thecommunication field. Switch is one of the most important elements in RF circuit, studyingon RF MEMS switch with low insertion-loss, high isolation, low actuation voltage hasbecome hot topics. Based on MEMS switch, the MEMS phase shifter has manyoutstanding performances, such as broadband, low loss, miniaturization. Therefore, theMEMS phase shifter has a brilliant perspective in RF circuit application, especially inantenna array.This thesis takes MEMS switch and MEMS phase shifter of "Basic TechnologyResearch on Millimeter-wave Antenna Array with MEMS" as a research object. It sets outfrom the actual engineering application, introducing and designing two kinds of MEMSswitches and three kinds of MEMS phase shifters.The section of MEMS switch introduces capacitive MEMS shunt switch and metal—contact Cantilever MEMS series switch, including the basic theories and principles,technique guideline, process flows and several kinds of means to realize. Some schemesare put forward, which can lower driven voltage of capacitive MEMS shunt switch and areused for reference of the design of metal—contact Cantilever MEMS series switch. Thesection of MEMS phase shifter discusses switched-line MEMS phase shifter, distributedMEMS phase shifter and reflected MEMS phase shifter with their basic theories and kindsof factors of design. Design and simulating is carried out after importing the switch model.Then according to the project target, metal—contact Cantilever MEMS series switchand reflected MEMS phase shifter are processed. The measure performance is similar tothe simulation performance, except some errors of a few measure data. But it can alreadysatisfy the demand of the engineering application.Because of restrictions of many conditions, the research of this problem is still stayingat a more shallow level, so the thesis puts forward the direction to do more research anddevelop of the problem. It sets matting for the further study and research of this topic.