| Microwave phase shifter is a device that can change the phase of electromagnetic wave. It is widely used in the phase array radar and microwave communications systems. So the high performance phase shifter has vital function in these systems. Compared with traditional phase shifter, MEMS phase shifter has many advantages, such as, broadband, low loss, low cost, miniaturization, circuit integration.Based on the principle of MEMS phase shifter, the distributed MEMS phase shifter is mainly researched. First we analyze calculation methods and effected factors of MEMS phase shifter parameters, such as, Bragg frequency, pull-down voltage, phase shift and so on. Second these parameters are simulated using the ADS and HFSS software, so the design of MEMS phase shifter is optimized. Then the Ka band distributed MEMS phase shifters are designed and manufactured using proper process. At last, the results of the fabricated samples are tested and analyzed.It is an important general target of phase shifter to get large phase shift, high reliability and low pull-down voltage at the same time. After thinking over all kinds of factors effecting MEMS phase shifter performance, the MEMS phase shifter with 0-253 @35GHz phase shift at 25V bias voltage and 3.1x106 times lifetime has been achieved. The lifetime is near the overseas report of one switch. In addition, it is an innovation to analyze and simulate the Bragg frequency. It not only provides some gists of designing the Bragg frequency of MEMS phase shifter, but also is the one-up report in the world.Based on above study, we also research the contact MEMS switch in the switched-line MEMS phase shifter. The contact MEMS switch that we designed and fabricated can get good isolation and transmission performance.The results of measurement suggest reasonable design and feasible material chosen and fabrication process. We believe that MEMS phase shifter will have large technical potential and wide applications.
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