Study Of Laser Speckle Metrology Technology And Its Applications

Laser speckle metrology is a modern optical measurement technology which is progressing rapidly in recent years. It has many merits like whole field, non- touch, high Precision and so on, so more and more attention have been paid to it. The Laser speckle metrology develops with the development of electronic, computer and laser technology. Now, this method has been used in industry and other fields proverbially.This paper reviewed the basic theory and the development history of laser speckle and several main methods of speckle metrology, such as: The speckle photography(SP) , the speckle interfereometry(SI), the electronic speckle pattern interfereometry(ESPI), the digital speckle correlation methods(DSCM)and so on.In this paper, the three projects mentioned below are our main attention aims. One is to measure the depth of transparent medium by digital speckle correlation method. The other is the calibration of rotation axis in 3D surface figure digitized by speckle method. And the last project is using the hybrid technology of electronic speckle pattern interferometry(ESPI) and gray level method to measure nano-scale deformation. Compared to the phase shifting method, this method is very easy to operate and has a higher precision. So it is worthy to give it more attention.