Phase-shifting Interferometry Measurement Of The Phase Unpack Algorithm

Phase shifting interferometry (PSI) is a high precise and sensitivity method in testing technology , especially in three-dimensions profile measurement. As for it's non-contact metrology method, it is widely used for testing many physical parameters So phase shifting interferometry plays very important role in high precise optical testing filed.According to the fundamental principle of PSI in the dissertation, we can see the phase we acquired is wrapped in the range from -π to + π, i.e. "wrapped phase". In order to acquire the original phase that can describe the measured physical parameters , unwrapping is needed. And the step has become the key of PSI.In the dissertation, we makes a profound research on the arithmetic of phase unwrapping. At first, recognizing the invalidation area and the bad data caused by the noisy is introduced particularly. This step can assure the precise in unwrapping phase-map . And then, after analyzing the region growing particularly, a new method, based on discrete cosine transform non-adding right mean-squares arithmetic by means of spreading phase pattern, is proposed. After making programs , processing experimental data and emulating these two arithmetic are analyzed and compared.