Tiny Laser Processing Zone Temperature Measurement System Spatial Resolution Capabilities Study

Monolithic optoelectronic integrated circuits (OEICs) integrate optoelectronic components and electronic components onto one chip. It has the advantages of high speed, small size and cost-effective. The fabrication of monolithic OEICs is confronted with the incompatibility problem between optoelectronic components and electronic components. Though enormous efforts have been made to overcome this difficulty, the problem has not been solved perfectly. Laser assisted microprocessing of semiconductors have the advantages of"low temperature processing"and"direct writing". It is promising to use this technology in the fabrication of OEICs to solve the incompatibility problem.In laser assisted microprocessing, time is an important parameter, which has effect on component's performance, so temperature distributing for small laser-processed region must be well measured. In order to make temperature measurement not effect temperature distributing, we developed a real-time temperature measurement system using radiation thermometry. Because of many factors, the space resolving power is lower, it is difficult for the temperature measurement system to precisely measure the true temperature distribution.The purpose of this work is to improve the space resolving power of the temperature measurement system for small laser-processed region. The main conclusions and contributions are as follows:1.After expatiating upon the principle of radiation thermometry, we mainly discuss the effects on the space resolving power and the measurement precision of the real-time temperature measurement system by some factors. The theoretical results showed that point spread function's distribution and the stray light mainly influenced the space resolving power and the measurement precision of the temperature measurement system, so we supposed some methods, which can improve the space resolving power, and the results proved the space resolution improved from 37μm to 16μm.2.Having made the space resolution come to 16μm, in order to improve the space resolving power more, we used image reconstruction method to reconstruct the...