Microfluidic Measurement And Control Components

As the rapid development of MEMS technology, the Microfluidic Control System (MCS) based on silicon substrate-microflow sensor is becoming the focus of many related researchers for the reason that it features various advantages such as: tiny invalid volume, low energy consumption, favorable control precision and prompt responding speed. Nowadays, Microfluidic Control System (MCS) has become a significant branch of MEMS exploration. It can solve microfluidics problems easily in a brand new dimensional system, and it will impact the chemical, medical and biological researches greatly in the coming days with no doubt.With the microflow theoretical analysis, study on a kind of silicon microflow sensor base on piezoresistance effect. The microflow sensor is the cantilever , so it has the advantages of simple technology, low cost and small volume. In measuring, the volume flow rate causes a deflection of the cantilever. And strain of the cantilever is detected by the piezoresistors integrated on the supporting end of the beam. Wheatstone bridge was configured with the piezoresistors in order to measure the output response. The output voltage increases with increasing flow rate, obeying determined relationships.At first, analysis the theory of microflow flow; then, make use of IntelliSuiteTM's Analysis mould, Which providing reference for further comparing and analysing the theory and experiment of MEMS devices; finally, fabricate the structure with the MEMS technology of anisotropic etching of silicon, and measure the experiment datum.This dissertation will be discussed in 6 chapters as below: Chapter 1: IntroductionChapter 2: The flow characteristics of microfluidics Chapter 3: The principle of the micro flow sensor and the simulation of thetechnics process.Chapter 4: The simulation the flow microfluidics Chapter 5: The manufacture of the microtiow sensor Chapter 6: The experimental result and the final discussion...