Micro-processing-type Optical Passive Design, Production And Analysis

The thesis presents two kinds of optical passive devices as optical switch and variable optical attenuator based on non-silicon-micromaching technics.The devices were generally simulated and analyzed by ANSYS and mechanics of materials.Moreover, experimental results of each device were reported.The content of this thesis is primarily classified into five parts. ①The first part summarizes the modern tecchnoligies and development for optical switches and variable optical attenuators, involving the pros and cons of them.②The second part is the arrangement for the design of direct-coupled optical switches and variable optical attenuators.analyzing return loss, insertion loss and precise calibration of them.③When it comes to the third part, a design of micromachining based 1 X 2 direct-coupled fiber switch is introduced. CNC engraving and EDM techniques were used to fabricate a switch sample where a movable fiber mounted on a micro-machined flexure is driven electromagnetically, and output light beam is directly coupled to two other fiber end surfaces; the switch features a low driven voltage(5V), fast switch(<2ms) and low insertion loss(0.9dB~l.ldB).④In the fourth part, a design of micromachining based direct-coupled variable optical attenuator (VOA) is presented. The device operates by misaligning a fiber-to-fiber coupling through a lateral displacement of one of the fibers mounted on a micro-machined flexure driven electromagnetically. The VOA was fabricated using CNC engraving and laser spot welding technologies and features a fast dynamic response (<2.3 ms), great dynamic range (0~65dB) and wide bandwidth.⑤The fifth part contributes to the design of optical an array of 1x2 switches for intelligent optical network (ION),by utilizing a micromachined wedge-shaped double side micro-mirror for the change in optical beam path of input light. Performance of the switch array prototype was reported, featuring a fast switch time of less than 750μs and extremely low cross-talk <-70dB with an insertion loss of between 0.6 and 0.8 dB.The final part of this thesis presents the pros and cons of the above experimental sample devices,putting forward three new ideas based on the former experience and reference.