Oriented Design And Simulation Of Smart Skin Micro Shear Stress Sensor

The aircraft in the future must have the ability of lightweight, small size and low power consumption. The smart skin compositing the devices made by MEMS technology which have self-sensing and self-adapt controlling functions meets with the requirement mentioned above. So the smart skin has became the important issue of initiative aerodynamic controlling in the AERO-MEMS field. The micro shear stress sensor which based on the smart skin for boundary-layer separation point detection of delta wing has been explored in this paper.According to the theory of boundary layer and the important of boundary-layer separation point detection of delta wing, the measuring principle and structure scheme of various system alternatives based on MEMS technology have been discussed, selecting the prototype of better workability.Base on the master piece model of micro shear stress sensor . discussion the design of the process flow and device structure of comb capacitance mode micro shear stress sensor in details, selecting suitable thin film material. Finite element analysis the structure and fluid coupling of comb capacitance device was performed by ANSYS software.Finally, because of the surface process of the thermal shear stress sensor is very complex, the simplified bulk process had been presented, and the design of the device structure and the physical dimension was presented. Then the model and wind tunnel test of thermal shear stress sensor array had been discussed, and the thermal analysis of the device was performed by ANSYS. the temperature profile of thermal structure.The thesis give a good reference to design of the comb capacitance and the thermal cavity shear stress sensor used in the smart skin.