Mems Accelerometers Front-end Amplifier Design And System Modeling And Simulation

With the development of MEMS inertial technology, MEMS inertial devices are widely used in both military and civilian fields. MEMS inertial devices have the advantage of small device size, low power consumption, excellent stability and good environmental adaptability. Combining the improvement of IC design methodology, MEMS device and processing technology, accuracy of inertial MEMS device has ever been improved.In this thesis, a closed-loop accelerometer is designed which reaches equilibrium position by electrostatic force. A method for modeling the mechanical module has been established to enable system level simulation. In order to analyze the system stability, a closed-loop accelerometer model has also been configured. A method for automatic elimination of gain deviation has also been proposed.The accelerometer readout circuit has been designed in a 0.6um Bi-CMOS process. In the open-loop operating mode, the accelerometer system achieves 1KHz bandwidth, 2.0V/pF gain and 80dB SNR. When operating in closed-loop mode, System bandwidth and gain of the circuit associated with the mechanical parts in closed-loop, the SNR is better than 80dB.