Ecr Ion Source Parameters On The Effects Of The Ion Beam

Without cathode, ECR ion resource can work steadily for very long time with stronger ion current ,stable performance ,corrosion resistance and lower pressure. therefore, ECR has been widely applied in many fields. At present, there is a high-yield neutron generator which adopts ECR ion resource.Due to complex experimental device structure, measurement of dynamic parameters of ECR ion resource is very difficult. At the same time, these parameters influence each other. Preliminary experiments have been proved that these factors affect the size and stability of beam seriously, even lead to no generation of beam of the ECR ion source. In this paper, based on the preliminary experiments, part of component s of ECR ion source has been improved, main parameters such as microwave power, gas pressure, magnetic field, plasma density, beam intensity has been measured. Using the rule which is obtained by researching the relationship between main parameters and ion current, working state of ECR ion source have been adjusted and acquire stable, high-intensity, good quality ion beam. The main work and achievements of this thesis are as follows:It is a brief introduction about principle of electron cyclotron resonance, working principle and experimental device structure of ECR ion source and generated forms of low-temperature plasma.Rectangular waveguide transition and microwave input window are analyzed and simulated, which are belong to main structure of microwave transmission of ECR ion source .The thickness of the microwave input window and magnetic mirror structure of the ECR ion source have been improved. Vacuum system and the automatic control system of the ECR ion source have been analyzed.The methods of test have been analyzed, which is used to measure microwave power, gas pressure, the discharge chamber magnetic field, ion beam. An initial diagnosis to measure the density of ECR ion has been finished by using Langmuir Probe (with Launch probe and single probe). The relationship is researched between ion beam and microwave power, between the ion beam and gas pressure of discharge, between ion beam and the magnetic field distribution. The best the reference values are get in the best working state of ECR ion source by optimizing these main parameters.