Interference Microscope Measurement Sphere Of Small Radius Of Curvature

Radius of the spherical surface is the most important parameters which directly determining the optics capability of lens. Assuring the radius of the spherical surface during production is the sticking point of quality of lenses. On the basis of analyzing the whole bag of tricks of spherical surface test, I have researched the damped least square method and established the mathematic and physical model of calculating radius of spherical surface by using the damped least square method. I have analyzed the initial value choosing and the damped gene minutely. In the experiment of measuring radius of spherical surface, I gained the interference pattern by using interferential microscope, CCD and the computer. I calculated the radius of the spherical surface through the interference pattern and demarcate, and got a good result.The linearity of the PZT has a big influence on the quality of the interference pattern. I established the mathematic and physical model of calculating the non-linear emendation of PZT by using the damped least square method. I have analyzed the initial value choosing and the damped gene minutely. In the experiment of measuring non-linear emendation of PZT, by dealing with some interference patterns which were phase-shifted by PZT, the non-linear emendation of PZT was measured and the theory of revising was calculated. According to the theory I compiled the software, and analyzed the error of the data in experiment.