| A valve-less PZT micropump with isosceles triangle cross-section nozzle-diffuser elements was investigated in this paper. The fabrication processes of pump chamber and nozzle-diffuser layers were confirmed by IntelliSuite software and then the micropump was fabricated by MEMS technologies. Experiment showed that the maximum volume flowrate was 12μL/min at 8000Hz with applied voltage 250V and the maximum backpressure was 578Pa. Static simulation verified by stationary flow measurements was used to analyze the effects of opening angle, length and neck width on diffuser loss coefficient and diffuser efficiency respectively. The optimized structure parameters that improved the micropump performance were given. |
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