Xml-based Mems Processing, Database Design And Implementation,

Micro Electro-Mechanical System (MEMS) has a huge market in the future and The research of MEMS involves such respects as the device, material, process, design method, etc. Recently, with the rapid development of MEMS, the MEMS CAD tools have been the focus of the present MEMS research.As one of the key mutual databases of MEMS CAD, process database is a kernel module of process-level design in the MEMS integrated design platform (MEMS GARDEN 3.0) and required to computer-aided design for MEMS, which has important applied value.At first, the characteristic of MEMS fabrication processes were probed into and the detailed classification and analysis to the processes was carried on, so the main influence parameters of the typical processes were drawn.Secondly, contraposed the characteristic of MEMS fabrication processes which is various in style,lots of parameters with complicated relation ,the process information was modeled with XML technology. Probed into the model of data based on XML, the process description markup language was established and with which the process information was described.Thirdly, by means of using Unified Modeling Language(UML),the database was analysed and designed in detail. On this basis, the system was realized.At last, the database system was integrated into the MEMS integrated design platform (MEMS GARDEN 3.0) through Tcl/Tk language.This system not only provided the craft data for designer to support but also contributed to improving the design efficiency of MEMS device, and good foundation for application of MEMS GARDEN 3.0 was established.