Implantation Nifeco / Of Ag Non-continuous Multilayer Giant Magneto-resistance Effect

The multilayer films composed of zero-magnetostriction alloy NiFeCo and non-magnet metal Ag were deposited by RF magnetron sputtering. The effect of Co ion implantation, anneal temperature and the structure of multilayer on the surface morphology, giant magnetoresistance (GMR) and magnetic property of discontinuous NiFeCo/Ag multilayer films were investigated. The GMR and magnetic property of the discontinuous multilayer films were measured with four-point probe device and Vibration Sample Magnetometer (VSM) respectively. The phase structure of the films was determined by X-ray Diffraction (XRD). The component of the films was analyzed by Auger Electron Spectroscopy (AES). The surface morphology of the films were observed by Scan Electron Microscope (SEM) and Atom Force Microscope (AFM) respectively. The result showed that:The technical characteristic of RFMS-4 sputtering apparatus in depositing nanometer multilayer film is stable. The concentration and deposition rate of the films are controllable with the optimization parameters on the RFMS-4 sputtering apparatus.The GMR of the discontinuous multilayer film of [NiFeCo(10nm)/Ag(10nm)]2o is nearly zero. After Co ion implantation, its GMR can reach to 2.5% without anneal.. For the [NiFeCo(x)/Ag(y)]2o (x, y=5,10,15,20nm) discontinuous multilayer films without Co ion implantation, annealed at 360 癈, the structure[NiFeCo(10nm)/Ag(10nm)]2o has the highest GMR of 11% at room temperature (the saturation magnetic field is IKOe); After Co ion implantation, the GMR of the same structure films can reach to 12.4% after 360癈 annealed.The effect of anneal on the GMR of Co ion implantation discontinuous multilayer films is greater than that of without ion implantation films.The effect of anneal and Co ion implantation on the structure, surface appearance and GMR of discontinuous multilayer films is greater than those of granular films. After annealed and Co ion implantation, the highest GMR of the former is higher than that of the latter. The saturation magnetic field of discontinuous multilayer films is IKOe, nine times lower than that of granular films.