Magnetron Sputtering Of Tio <sub> 2 </ Sub> Thin Films And Their Nature Study

Photocatalysis of semiconductors is a widely investigated subjeet during the past 30 years.Among them,titanium dioxide is the mos tlatent material for its chemieal stability, wearibility,low cost and innocuity.In this paper the high pure Ti and TiO₂ pieces are taken as the target,argon is taken as protective gas.The thin films are deposited on glass substrate by RF magnetic sputtering. Then the thin films which have been deposited are annealed in the muffle.Investigate the influence of two types of targets on the structure of thin films.The results showed that thin film obtained by high pure Ti obtained larger particlesIn order to contrast with the glass substrate,choose the quartz,ITO glass,ceramic,Ag to be four matrix materials,high pure Ti as target to prepare TiO₂ thin films.Different substrate ofTiO₂thin films may have different effects of crystal structure.Use magnetron sputtering,high pure Ti as target.Change the different preparation parameters,such as sputtering pressure,sputtering power and annealing temperature, annealing atmosphere.Investigated the thin film crystalline structure.Deposition of amorphous thin films of titanium in air under conditions of low temperature annealing(400℃-600℃) is accessible to the anatase phase transition,at a higher annealing temperature (800℃-1000℃) amorphous thin films of titanium transform to the rutile phase.Study the surface of TiO₂ thin film by using scanning electron microscopy(SEM), atomic force microscope(AFM).Besides,we test and analyze the crystal form of the different thin films by Raman spectroscopy and XRD.In order to analysis the effection such as the annealing temperature,sputtering pressure on the transmission rate of TiO₂ thin films,films are tested in transmission by UV-Vis spectroscope.In the end,the prepared TiO₂ thin films are tested in lighting catalyze.Compare the different light source,different initial methyl orange concentration,different pH values, study the methyl orange decolorization rates.