Prepared By Rf Magnetron Sputtering Of Tio <sub> 2 </ Sub>, Zno Thin Films And Nature Study

The thin solid film of the material science always takes a very important part in manybranches of the materials science. TiO₂,ZnO thin films have good functions such aspiezoelectricity, gas sensitivity, lighting catalyze and so on. They are widely applied tomicro-electronics, optics, sensor, lighting catalyze.In this paper the high pure Ti and Zn pieces are taken as the target, oxygen is taken asreaction gas, argon is taken as working gas. The thin films are deposited on differentsubstrate by RF magnetic sputtering and RF magnetic reaction sputtering. Then the thinfilms which have been deposited are annealed under different temperature in themuffle. Those annealed metal thin films are transformed to metal-oxide thin films. Besidesthat, the metal-oxide thin films are also heated up to be annealed in different temperature inthe muffle.Metal titanium thin film easily transforms to rutile TiO₂ thin film, however,deposited TiO₂ thin film easily transforms to anatase TiO₂ thin film after annealed in themaffle. In the same way, metal zinic thin film is transformed to zinic oxide, but this thin filmis loose and unsmooth comparatively.In order to analysis the effection such as the oxygen flux, annealing temperature,TiO₂,ZnO thin films are tested in transmission by UV-Vis spectroscope. Besides that, byusing scaning electron microscope(SEM), the surface of the thin film is determined to theoxygen flux. Besides, we test and analyse the crystal form of the different thin films byRaman spectroscopy and XRD.In the end, the prepared TiO₂ thin films are tested in hydrophile and lighting catalyze.