Sol - Gel Technology To Prepare Zro <sub> 2 </ Sub> / Sio <sub> 2 </ Sub> Multilayer High Reflective Film Study

Optical film production were product by Sol-Gel method, which has been proved a useful new process. Thin film can be product in normal temperature and pressure by Sol-Gel method, thin film have high-purity, thickness can be control easily, preparation cost is very cheap ;in other aspect, the equipment is very inexpensive, easy realized large acreage coating and the coating procedure can turn to industrialization. The new modal high power lasers for inertial confinement fusion (ICF) in our country, the chief optical element such as baffle glasses, frequency multiplication crystal, on-off crystal, range window glass, all of this optical element must be planting by sol-gel method. At present , multi-layer ZrO₂/SiO₂ is attract many people of scientific research by its excellent optical characteristic and high laser damage threshold., the sol-gel multi-layer ZrO₂/SiO₂ can be replaced physical multi-layer high reflecting film in the high power laser system, so analysis and research sol-gel multi-layer ZrO₂/SiO₂ had became a very important and imperative things.In this dissertation, theoretical analysis and experimental test are used to research the single-layer SiO₂, single-layer ZrO₂ and multi-layer ZrO₂/SiO₂ thin film's optical characteristic and high laser damage threshold. Optical microscope, UV-VIS spectrophotometer, FT-IR, Ellipometry and AFM are used to get the thin film's optical characteristic , damage threshold is measuring by SAGA Laser. The measuring data. Conclusions are as follows:1.The high quality colloidal suspension of ZrO₂ and SiO₂ can be prepared in the proper experiment condition and in the proper chemical composition match., the experiment chemicals are Zr(OPr)₄, ammonia liquor, CH₃CH₂OH, ZrOCl₂·8H₂O, PVP and so on.2.Theoretical research the experiment device such as ellipometry, UV-VIS spectrophotometer and obtain the optimum conclusion , ready for the proper detection of thin film in the later.3.Design the optimum program in the theoretical by the TFCalc Thin Film Design software. Sol-gel multi-layer ZrO₂/SiO₂ film were deposited on K9 glass by spin-coating method. All of the experiment device such as ellipometry, UV-VIS spectrophotometer and optical microscope were used to measure the film, compare the theoretical analysis and experimental test, we can obtain the proper conclusion.4.The infiltration is exist between the multi-layer ZrO₂/SiO₂ film and serious weaken the optical characteristic and laser damage threshold, so analysis and research the infiltration between the multi-layer thin film is very important things.In this dissertation, we will detailed illustrate this problem in the fourth chapter..5.Laser damage threshold of thin film was tested by the SAGA Laser and the many test data was obtained. Through multiple experiment and analysis, we obtain a piece of high reflectance thin film with high quality finally, completing the project task successful.