| Diamond is now noticeable because of its unique characteristics in mechanics, calorifics, optics and electrics. The most important application field of diamond is that the diamond film is being widely used in high frequency,high power, or high temperature electric devices as an electron emission material. The preparation,characterization and application of nanocrystalline diamond films have become a new " hot point " in the development of diamond films prepared by chemical vapor deposition.In this paper, we simply introduced the preparation process of nanocrystalline diamond films with MPCVD method,and the result of surfaces analysis.Then we designed an experiment device to measure the SEE coefficient (δ) in reflection mode.An expectable aim(δ=15) has been achieved. |
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