Active Vibration Technology - A Single Point Of Detection And Pzt Compensation

In this paper, the development of vibration-resistant interferometers is reviewed firstly, then, a novel, low-cost, well-adaptive, engineering-oriented technique, single-point phase-detecting vibration-resistant method, is presented based on a large amount of experiments and existed methods. The method uses piezoelectric transducer (PZT) as vibration-compensating device. The design of electro-circuit and the control flow with DSP are described in details. The mechanism of PZT driven mirror and the PZT driver are greatly improved on their performance of frequency response and linearity. With these improvements, a vibration-resistant phase-shifting interferometer is set up finally, and sufficient online experiments are carried out on it. By comparing the experimental results in different vibration environments, we find that the interferometer works well in the presence of vibration whose product of amplitude and frequency is less then 50 waves-Hz, there is no obvious error caused by vibration.