| Hydrogen selenide is a kind of important electronic gas which is widely used in the semiconductor industry. As an important raw material and reducing gas for production of semiconductor materials, hydrogen selenide is mainly used in the production of semiconductor devices. Hydrogen selenide can be used for forming the P-N protective layer and the isolation layer on the semiconductor surface. High purity hydrogen selenide has very important application in the field of national defense and aerospace. With the rapid development of semiconductor integrated circuit industry in China, the demand for the high purity hydrogen selenide is increasing, and the research enthusiasm in hydrogen selenide synthesis technology of researchers were greatly improved. According to the literature, there are two main methods of preparation of hydrogen selenide. One is obtained by the reaction of metal selenide and water. The other one is obtained by direct combination of high pure hydrogen and selenium under high temperature. When the temperature is570℃, hydrogen selenide production was maximal (more than50%).In this paper, the second method was selected. The hydrogen selenide synthesis device and the exhaust gas treatment system were designed to ensure the production process operation and environment safety, and the high purity hydrogen selenide industrial scale production was achieved.Content of various impurities in hydrogen selenide products were analyzed by the pulse discharge helium ionization chromatography, flame photometric detector chromatograph, hydrogen flame photometric detector chromatography and trace water detector.The various impurities in hydrogen selenide were deeply removed through the multi-level absorption technology and filtration technology. The purity of the purified product reached4N standard. The product quality is stable and reliable. The product quality meets the requirements of high-purity hydrogen selenide in the field of semiconductor industry. |
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