Investigation Of FeCo-based Soft Magnetic Films Prepared By Electrochemical Deposition

In recent years, with the development of electronic information industry and the communication technology, soft magnetic thin film is widely used. Due to the requirment of hige frequency miniaturization, magnetic thin films used in GHz should have high saturation magnetization, high permeability and high magnetic anisotropy. As the FeCo-based soft magnetic alloy has high magnetic anisotropy and high saturation magnetization, It shows a potential application in high-frequency electronic devices, such as the sensor, magnetic recording, inductors and transformers.By magnetron sputtering and molecular beam epitaxy, researchers have prepared soft magnetic thin film with high frequency magnetic properties. However, the methods above-mentioned require a vacuum environment, so the cost is relatively high and the mothods are difficult to adapt to the large-scale industrialized production. Compared with them, electrochemical deposition cost less, and need simple equipment, so electrochemical deposition has been widely used in industrial production. In order to make its application in practical production, perfect parameters are needed to fabricate magnetic thin films with excellent magneticproperties. In this paper, we studied the effect of electrochemical deposition parameters to the structure and the magnetic properties of FeCo-based films.1) We study the process parameters of FeCoZr soft magnetic thin films prepared by electrochemical deposition method. The electrodepotion parameter includes solution composition, external magnetic field. By changing the ratio of solution, the resonant frequency of FeCoZr film can be adjusted In the range of1.1-2.9GHz. By changing stripe width and external magnetic field, the anisotropy field film reaches1200Oe and the resonance frequency reaches6.6GHz.2) We also study the experimental parameters of FeCoCd soft magnetic thin films prepared by electrochemical deposition method. The electrodepotion parameter includes deposition potential, solution composition and deposition time. By changing the above factors, we obtained the key parameters of magnetic thin films:the easy axis coercivity of12.3Oe, the hard axis coercivity of5.3Oe, the anisotropy field of60Oe, and the resonance frequency of3.2GHz.3) We deposited FeCo thin films on Cu substrate and PET substrate with the method of electrochemical deposition. We can change the anisotropy field through the method of changing the stripe width and the substrate curvature. Without external magnetic field, the anisotropy field is432Oe.