Preparation Of Soft Magnetic Thin Film By Electroless Plating And Induce In-plane Anisotropy By Laser Etching

Ni-based and Co-based alloy which widely used in the radio field, sensor and magnetic recording are commonly soft magnetic materials. Ni-based alloy has high magnetic permeability and low coercive, while Co-based alloy has high saturation magnetization, high anisotropy constant, high Curie temperature and high resistivity. However, pure metal alloy materials such as FeNi, FeCo are restricted in industrial field because of they are easily oxidized in the air and its magnetic property will be destroyed. One solution to the problem is mix with a few nonmetallic elements, such as B, P and so on. These elements not only improve oxidation resistance of metal alloy materials, but also refine the grain, and enhance the soft magnetic property of film.Generally speaking, soft magnetic films are obtained through methods like physical vapor deposition, electrodeposition, electroless plating and so on. Among them, electroless plating technique is now emerging as an important method because of its high deposition rate, good adhesion, good flatness, low cost. In this paper, Ni-P thin film, Ni-Co-P film and Ni-Co-Fe-P film were deposited by electroless method and trying to induce in-plane uniaxial anisotropy by laser etching. Then the structure, morphology and magnetic properties of the samples have been studied by means of X-ray diffraction (XRD), scanning electron microscopy (SEM), atom force microscopy (AFM), vibrating sample magnetometer (VSM).The main contents of this paper have been listed below:(1) We studied the planting time, reducing agent concentration on the crystal structure, film composition and magnetic properties of Ni-P film. We also studied the proportion of metal ions in the bath on the crystal structure, film composition and magnetic properties of Ni-Co-P thin film. At the same time, we trying to electroless plating Ni-Co-Fe-P thin film.(2) The effect of rapid magnetic field annealing on the structure and magnetic properties of Ni-P film was studied.(3) We successfully induced in-plane uniaxial anisotropy in Ni-P film and Ni-Co-P film by laser engraved line method. Finally, we studied the effect of laser parameter on in-plane uniaxial anisotropy and obtained an effective method to control in-plane uniaxial anisotropy.