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Data Simulation Model Based On PIC-MCC Micro Plasma

Posted on:2016-10-20Degree:MasterType:Thesis
Country:ChinaCandidate:H LiangFull Text:PDF
GTID:2180330461488880Subject:Integrated circuit engineering
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Micro-plasma devices have the characteristics of a small size discharge space and the discharge gas pressure near atmospheric. It shows the different characteristics from the conventional plasma discharge device. In recent years, it attracted widespread internationally attention as a new discharge light device. To better understand the details of discharging process of the device as well as save device fabrication time and exclude influencing factors of device fabrication, in the initial conditions of the discharge medium we studied the impacts of the different external load voltage and varying pressure on the characteristics of the micro plasma in discharge medium. The simulation results show that the studies of the micro-plasma characteristics mainly include the change of electron density, ion density, electric field strength and the current size over time.According to the analysis of the micro-plasma discharge density, we can know the variation of electron density with different voltages in the micro-plasma discharge medium. Of course, this experiment is only a theoretical study and in the actual process of micro-plasma discharge, the micro-plasma discharge features in the region is depends on the real discharge environment.The electron density is reduced after the increase with different voltage environment by using the PIC-MCC computing model in 350Torr atmospheric pressure.In the discharge medium, the moment of the maximum electron density appearing came earlier and earlier and it generated more electron with the increase of voltage. But after 400V there will be a period of relative stability and the maximum electron density appearing time is not changed. The value of the electron density also increases and the slope reached 360.19 at a rapid growth rate.The variation of the electron density represents a change about current. There is two rapidly increase zones and the middle of the two zones is a preparation stage. When the voltage is 240V, there is no secondary discharge. With the increase of the voltage, the time of beginning discharge is earlier and earlier. When the voltage reaches 400V, it tended to stabilized and remained near 10ns.Under different pressures and different voltage, the value of the initial horizontal electric field(E1) and the value of the initial vertical electric field(E2) is not equal to 0. The change of scope of the vertical electric field(E2) is significantly bigger than the horizontal electric field(E1). With the increase of the voltage, the changing time of the horizontal electric field(E1) and the vertical electric field(E2) tended to 10ns and the maximum always tends to 20ns.The maximum of electron density increases with the pressure increase. When the pressure is 500Torr and 760Torr, the maximum occurs time increases firstly and then decreases. When the pressure is 350Torr and 1100Torr, the maximum occurs time increased faster.The maximum of ion density increases with the pressure increase. When the voltage is less than 360V and the pressure is greater than 350Torr atmospheric pressure, the maximum ion density is the greatest. When the voltage is greater than 360V, the maximum ion density also increases with the increase of the atmospheric pressure.Under different pressures and different voltage, the horizontal current(Ⅱ) and the vertical current(I2)’s appear time is similarity. When the pressure is 1100Torr atmospheric pressure, the final time tends to 10ns.
Keywords/Search Tags:Micro-plasma, discharge characteristics, electronic density, neon density, electric field, current
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