Employment Of A New Equipment Of Precise Optic Elements For Surface Cleanliness Level

The cleanliness level on the surface of optic elements is critical to the laser system, nowadays, the methods employed to inspect the surface quality of highly precise optics are mainly conducted by eyes, whose disadvantages are that consequences are directly correlated with the inspector's experience and the efficiency is low. Especially, when facing the situation that the quantity of optic elements is high and catalogs is various, this method is time consuming as well as the result is not stable. Consequently, a new inspection method and device is appealed with the characters of precision and high automation.Considering the device is situated in the circumstance of high cleanliness level, machine vision is employed to void the second time pollution for the high precise optic elements .actually, liner CCD is applied for the dimensional character of the elements by scanning the surface, furthermore, a Fig.is designed to fasten the elements and a three-dimensional electronical platform is employed to move the CCD in cartesian coordinates, eventually ,the scanned digital data is transferred to the image workstation for further processing and the cleanliness level are given based on the American military cleanliness standards.In this paper, main work are conducted as followsThe image principle technologies are discussed, and basis on those theories, detection device is designed including hardware design which comprises light source choice and bracket structural design as well as mechanical analysis.As the liner CCD only scans one line pixel and then a little piece of image is stored each time ,however a entre image is required when the scan are accomplished , image mosaic technology is studied to eliminating the disadvantages impact from mechanical move to the eventual images.Canny algorithm and snake mode are utilized to segment the image ,and morphology methods are also employed to obtain the information of flaws on the surface .Consequently the cleanliness level are given out based on the American cleanliness standard .