Research And Design Of Simulation Platform For Pressure Sensor

With the development of computer technology and the great demand for pressure sensor new technology, the computer-aided design for pressure sensors is increasingly concerned. In this thesis, the practicality principle is considered, the parameterized finite element analysis system for pressure sensor is developed based on Visual C++ and ANSYS interface technology. The system will promote the pressure sensor industry to higher level.The friendly man-machine interface is developed with Visual C++ software. The ANSYS command flow that is complex, difficult to understand and master is packaged in the background. Firstly, according to the basic characteristics of diaphragm, after the design theory, the membrane structure and the load characteristics are in-depth analyzed, the automated finite element modeling program for corrugated silicon diaphragm and the sensitive diaphragm is accomplished with APDL language. Then, the effect of several key parameters of the corrugated diaphragm on diaphragm membrane is analyzed. Especially, the effect of a few ripples, wave height and diaphragm thickness on the diaphragm center displacement is investigated. According to the membrane simulation data, the best corrugated diaphragm structure parameters are obtained. Finally, the surface strain difference distribution of silicon pressure sensor membrane is simulated and analyzed. The stress difference distribution of square diaphragm sensor chip is attained. The impact of film size on the strain distribution is investigated, and the intuitive and reliable results are attained.According to simulation results, the corrugated diaphragm and silicon-sensitive diaphragm is designed, which is used in production. Experimental results show that simulation results are basically consistent with the test results. These results show the simulation platform is reliable and have good applicability.