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The Designing And Fabrication Process Simulation Of The Wire-grid Polarizer

Posted on:2010-08-18Degree:MasterType:Thesis
Country:ChinaCandidate:Q GuoFull Text:PDF
GTID:2178360302960313Subject:Mechanical and electrical engineering
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In this thesis, the concept that micro-nano polarization sensitive arrays simulate the compound eyes of the desert ant is introduced. The structure of the compound eyes of the desert ant is simulated, and the micro-polarizer is designed. So it is possible to develop a micro-bionic vision sensor that is high sensitivity, high accuracy and low power consumption. The design and the simulation of the wire-grid are mainly studied. The research of the polarizer lays the foundation for the realization of the micro-nano navigation system.According to the request of the sensitive wave band of 380-520nm of the bionic micro-nano navigation system, a wire-grid polarizer is designed based on rigorous coupled-wave theory(RCWA). The TM transmission efficiencies are more than 62.8% and the extinction ratios are more than 474 in normal incidence. The metal oxide layers forming on the aluminum wires is modeled and the effect of the oxide layers on the performance of the polarizers is analyzed. The numerical results show that aluminum wire-grid polarizer has high transmission coefficient and extinction ratio over visible spectrum. The effects caused by dimension errors and shape errors on the diffraction efficiency of wire-grid polarizers were also analyzed by RCWA.Based on the finite element method and the ANSYS software, the filling process of hot nanoimprint lithography is simulated. Also, the factors that affect the filling process of polymer are analyzed in this paper. The effects of the aspect ratio, the width of the cavity and the duty ratio on the polymer deformation were analyzed in detail. Meanwhile, the cooling process is analyzed. In demolding process, Maxwell model is employed to describe the mechanical properties of polymer when the temperature near the glass transition temperature. The effect of the height of polymer, the friction coefficient on the demolding process is analyzed in detail. Numerical results present that the stress was reduced effectually by decreasing the height of polymer and the friction coefficient.
Keywords/Search Tags:Wire-grid Polarizers (WGPs), Rigorous Coupled-wave Analysis, Hot Embossing, Polymer
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