Dual H Bridge Power Of Medium Frequency Magnetron Sputtering

In order to overcome the target surface ignition in the DC reactive sputtering, in recent years puts forward a new pulse power supply for the plasma splash that AC sputtering power supply. Explain the reasons of main circuit adapting to the plasma in theory and give the circuit block diagram of power supply.Using the method of connecting dual H-bridge, we achieve the target of enhance the output voltage of power. In the same time, since we use two-target conversion technology, each metal target can change to each other safely.The past power in coat basically was set to be a power with constant current, using constant current to control sputtering method, this paper has studied the application of constant voltage power in coating technology, and the actual application prove that the constant voltage power can also be used in coating technology steadily.The task describes the working principle of the two inverters to achieve the high invariable voltage. Achieve zero voltage soft switching of IGBT by phase-shifted PWM control mode to improve the efficiency of the power supply. At the same time, analyze the sputtering phenomenon occurs when the abnormal discharge and propose a new circuit theory about clear arc.Describe the main circuit:specifies the main circuit design ideas of power supply and sets forth the two inverters of the main circuit. The second inverter circuit which uses the latest inverter thinking (H bridge in series inverter) and the new switching device - double insulated gate bipolar transistor IGBT. At length expound the design and production methods about high frequency transformer.Designs the control circuit: it is the most important to increase the frequency for reducing the size and eliminate the noise of power supply. First of all, introducing the main restricting factors on high-frequency is the hard-switching working status of power switching device. And thus explain the causes and classification of soft switch technology, also detail description of the soft-switch technology development process and typical circuit topology in various stages pointing out their advantages and disadvantages. In the analysis of the factors that limit high-frequency and the latest integrated research results of soft switching technology, analyses and design the phase-shifted PWM soft-switching control technique and control strategy of circuit.Discusse in detail the various protection circuits:over-current protection circuit, over voltage protection circuit, overload protection circuit and thermal protection circuits.Give the design results and the experimental results:The conclusion testifies that the power supply is stable, but also reliable and that it has good coating quality and good market prospects.