Research Of Mesh Generation Based On Finite Element Method(FEM) Application For Three Dimension Integrated Circuit(3D-IC)

Due to the complex structure of Three Dimensional-Integrated Circuit(3D-IC), the influence of parasitic parameters, thermal field distribution, current density distribution and other factors must be considered in the IC Design process. However the EDA(Electronic Design Automatin) tools which match with the 3D-IC have not been formed yet, therefore, it is most significant to study such research.Under the cooperate with a IC design company in Silicon Valley, This research develops a software named MeshforIC which is applied for mesh generation for Finite Element Method of 3D-IC. The software can generate meshes for well-established 3D-IC model, save the meshes' information as a data file and were loaded into finite element program. Do finite element numerical simulation analysis such as the thermal field analysis, current density distribution and so on.For special structure in 3D-IC, the research puts forward a hybrid meshes idea. It can mesh triangle meshes which meet Delaunay criterion and density appropriate adaptive quadrilateral meshes once loading or after establishing model. 3D model will be simplified to supra position of 2D, thus it will reduces the number of meshes and difficult for meshing. In addition, the research optimizes the meshes' modes and units' index number. In order to meeting accuracy requirements, the paper also adds mesh quality judgments function and mesh smoothing function.This research is based on object-oriented C++ language, using Visual C++6.0 as a platform for software development. The software divides into different modules according to different function, each module is accomplished individually and provides a good interface. The use of Object-Oriented technology not only reaches a requirement of "high cohesion, low coupling" ,but also increases the scalability of the software and reduces the programming difficulty.This research also designs a three-dimensional structure of a band-pass filter to verify the feasibility and actual value of the software. Simplify the filter model and generate hybrid meshes. Using Finite Element Method to simulate the thermal field distribution and current density distribution of the filter. Make use of HFSS to emulate its S parameters, gets the conclusion by comparing simulation results with measured results. Finally, mesh generation methods were summarized, meanwhile the most studied currently in parallel and intelligent meshing were prospected by this research.