Development Of Micro-adhesion Testing Device Based On Fiber Optic Sensor And Optical System

Adhesion was a very common and conspicuous phenomenon in micro/nano scale. It was proved that the smaller the material size and produced size were, the greater the size effect were. The failure of micro-electromechanical system (MEMS) was mainly due to the stiction of micro cantilever which become the key factor for the MEMS to improve capability.In the past two decades, the scanning tunneling microscope (STM), atomic force microscope (AFM), friction force microscope (FFM) , the surface force apparatus (SFA) and other testing devices played a tremendous role in micro-adhesion study. These testing devices were very high-cost and the measurement range was limited to nano scale. However, adhesion force of micro-component was always from urn to mN. At present, it hadn't appeared well-roundedly commercial apparatus withinμm -mN. Therefor, to research the various mechanism and law of interface adhesion, it had become extremely urgent to develop the adhesion testing device (ATD) fulfilling the different test conditions, such as temperature and humidity, load, rest time and speed.The progress and actuality of researching micro adhesion testing technology was summed up as well as their work principles and characteristics were analyzed. Author developed a micro-adhesion testing device based on fiber optic sensor and optical system, which able to control load, rest time and speed. The main study work and innovation of this thesis were followed.In this thesis, a non-contacting force measurement device consisted of fiber optical displacement sensor and double-leaf spring was deviseed, and the mechanics characteristics was analyzed. Making use of double-leaf spring eliminated the couple of horizontal force and vertical force, and effectively increased the system flexibility, expansibility as well as reliability.Author designed a multidimensional micro-movement table making up of step motor control system and piezoelectric ceramic micro-positioning system, and realized the loading function of coarse and micro adjusting. A piezoelectric ceramic packaging and clamping mechanism was contrived based on the compound dual-flexure hinge structure. The strong hysteresis, creep and nonlinearity of MTp200/10×10/20 pizeo actuator was studied, and the progress of researching pizeo actuator control technology was summed up.The data acquisition and microscopy video system were constructed and applied the function of collection, analysis, display and storage of adhesion force data as well as image. It provided testing means for analyzing measured samples' surface microstructure and researching micro-contact mechanics theory.The static characteristics of this measurement system was analysed. It was proved that the stability and reliability of the apparatus by the result of micro-adhesion testing experiment.