4-RPUR Flexible Micro-motion Parallel Manipulator Of Property Analysis And Research

In the last decade, micro-motion manipulator has developed rapidly. Micro-motionmanipulator is good at movements, able to reach submicron even nanometer positioningaccuracy. It has been widely used in the fields of MENS manufacturing, optical adjustment,fiber assignment, laser making semiconductor, biological medical, IC manufacturing. Withnanometer technology further developed, less DOF micro-motion manipulator characterizedwith positioning accuracy which can do micro operation is a main positioning tool, thus hashigh research significance.This essay is about micro-motion manipulator designed based on 4-RPUR parallelmechanism. It adopts piezoelectric ceramics as driving cell and with structure of flexure hingeso that is easy to control, compact and tough. The essay offers reference for organizationdesign by analyzing organization dynamics, statics, accuracy and inaccuracy.As the basis on study 4-RPUR micro-motion parallel manipulator and its movement trait,the essay builds matrix of reflection input, output displacement, velocity and accelerationthrough differential method so that lay the groundwork for accuracy.Micro movement of micro-motion mechanism becomes true through driving forcedeforming material and deforming close coupling. According to material mechanics theory, itdeduces stiffness matrix expression of micro inching robot branched chain flexible hingedeformation. To analyze perturbation micro-displacement, it is able to get the relationshipbetween them. Finally adopts imaginary power principle to build stiffness model to figure out4-RPUR parallel micro-motion parallel mechanism stiffness matrix.Based on position inverse solution and taking all kinds of difference source intoconsideration, it is significant to design and manufacture micro inching organization bymaking difference in general and compensation analysis. Rigid- flexible coupling is the mostcommon mechanics model in multiple object system. Exploring its modeling rule is importantsubject. Lead flexible hinge structure mode neutral document into ADAMS software asflexible body; build 4-RPUR manipulator mechanism rigid- flexible coupling model andrealize dynamic emulation; get kinematics rule curve. Under a certain loading conditions, dokinetics emulation for the organization to get the curve. It offers an effective analyticapproach to deeply understand 4-RPUR micro-motion parallel manipulator dynamic featureand eventually makes structure design possible.