Analysis And Design Of Electrode Structure For High Power Slab Waveguide CO₂ Laser

The thesis aims to design the electrode structure and its water cooling system of high power slab waveguide CO₂ laser. The size of the discharging electrodes is chosen based on"Power scaling of Large-area"theory. According to the related theory of heat transfer, electrodes structure is designed to meet the requirement, temperature distribution of gas in discharge area is analyzed, the correlated parameters of the heat exchange system are calculated, reasonable and effective water electrode cooling system is designed. Further researches are as following:(1) Advantages and disadvantages of the plate structure and waveguide array structure are compared On the basis of research results of RF excited slab CO₂ laser at home and abroad. Plate structure is simple and can be realized easily, so it is used widely in slab waveguide CO₂ laser. But the compaction of the laser devices is limited when increases output power.(2) The"Power scaling large-area"theory was deducted. At determined gas temperature profile and mixing proportion, the calculating result of ratio out power is present.(3) According to the relevant discharging theory and Power scaling large-area theory, the size of the discharging electrodes space and area is chosen, and a rectangular discharging gain structure that is composed of four Al electrodes is designed. In order to obtain uniform discharging voltage distribution, a group of resonant inductors between top and low electrodes are connected. It can restrict the voltage in the certain range. The number and value of the shunt inductor are related with voltage fluctuation range, electrode length, excited frequency and impedance of laser head.(4) Influence of Gas temperature on the laser and gas temperature distribution are analyzed. The equations of heat balance within the cooling system are established, calculation of heat exchanging are done. Parameter values of water flow rate, pipe diameter, pipe pressure difference are obtained. On the basis of that, the water cooling system of electrodes is designed.According to the research of electrode structure and its water cooling system for high power slab waveguide CO₂ laser, provides useful technical exploration for developing practical high power slab waveguide CO₂ laser.