Manufacture Of Microhollow Cathode Device And Simulation Of Discharge Theory

Microhollow cathode discharge (MHCD) is a newly advanced micro-discharge technique based on ordinary cathode discharge in a submillimeter level micro-hollow under high pressure. There are two most important characteristics in MHCD: first, there are a large number of electrons with high energy;second, the pressure of the discharge is high. Because of the numerous electrons with high energy, the ionization in the discharge area is in the discharge area is intensity, and electron and the ion are very dense in discharge area. Thus, MHCD can be widely applied to the domain which needs high density of charged particulates, such as thin film deposition, surface treatment, gas lasers, and external source of electrons. Moreover, because increasing pressure in discharges in noble gases favors excimer formation, the emission of UV and VUV radiation from MHCD is intensity. So MHCD will be promisingly applied to ultraviolet flat panel lamps and DC plasma display.This thesis focuses on MHCD theoretical research, a fluid model has been developed and used to simulated MHCD that operates in Helium with the different-structures device(splate-anode and hollow-anode), calculated the number density distribution of ion and electronic, the distribution of electronic energy, the potential distribution and the electric field distribution. The results showed that the MHCD operates in abnormal glow discharge, the number density of electron and ions is about 1019m-3, electron average energy is dozens eV. These results are similar to the experimental results in same conditions. And simulated MHCD characteristics in different pressures , different structures and different hollow cathode apertures. It can be concluded that increase of pressure and cathode aperture will limit the discharge space, and there is a restriction on the pd value for the starting of glow discharge.In experiments, to find a durable microhollow cathode discharge device, we have manufactured two structures molybdenum-Kapton polyimide film-molybdenum and copper-Kapton polyimide film-copper, High quality MHCD configuration can be obtained, when power supply parameters of Nd:YAG Laser has be chosen 430 A, 8ms. And with these two structures we have done discharge experimental study in different gas and pressure, through experimental research, although the glow discharge can be, the discharge is not very stable.