| 20th Century witnessed the fast development of Nano-technology and many relevant industries such as the semiconductor and bio-medical. As a result, Micro-machining has become one of the most active research directions in manufactory area. There are many methods to do micro-machining, and laser micro-machining is one of the most promising one. It has been widely used in micro-optics, MEMS, micro-electric and many other areas due to its merits of low cost, flexible method, wide application, ease to use and less pollution. It is very important for the development of our country's precision manufactory industry to develop laser micro-machining system with high precision and independent intellectual property.Based on serious research and further analysis, we designed a new NC system for laser micro-machining. It is an integrative NC system which uses nano-laser as the laser source, and PC as the platform for user and data procession. A motion-control board is integrated into the PC through PCI bus. We also modified and optimized the software according to the new system.What we mainly did is listed as follows:1. Decide the whole system design, make SM5004 as the center device of motion control processing, and PC as the User's interface and data process unit.2. Accomplished the design and debug of motion control board; designed the modules in CPLD, including the motion control pre-process module, laser control module and decoder module.3. Provided a new method to control the laser energy according to the motion control pulses, which is evaluated by experiment.4. Modified the software according to the characters of new system, including the format, communication method and extra functions.5. Added many new functions, such as circle interpolation, manual control, speed design, pen function, feedback display and so on.6. Finished the whole system debugging and did laser-machining experiment, which tested and validated the reliability and precision of the system. |
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