Integrated Research Of Micromation Fabry-Perot-type Cavity Array Spectral Detector

The optical spectrometer is an important instrument for analyzing the chemistry constitute and content of the material. The chip type integrated spectral analysis system becomes the key point which the people explore. This thesis is subsidized by the national natural science fund, which makes a study on Integrated key technology of Micromation F-P-type cavity Array Spectral Detector by adopting MEMS and IC technology, and hope to constitute a integrated F-P-type cavity Array Spectral Detector with small size, high-Luminous flux, high-sensitivity, high reliability. It's major research contents as follows:①. This thesis putted forward make a study on Integrated key technology of Micromation F-P-type cavity Array Spectral Detector by consulting a number of literature at home and abroad and the achievement about microspectrometer in our lab.②. Ihis thesis made a study on structure and principle of the Micromation F-P cavity Array Spectral Detector, analyzed the related theory and determined the system program.③. It adopted N+/P photodiode as the detector, and got the SPICE model and parameter of the photodiode.④. Based on the principle of the system, we designed the readout circuit which contained dynamic source follower and sampling maintain capacitance, and used the shift register to scan the signal and bit by bit transfer. This circuit had simple structure, low power consumption and effective denoising. Besides we had completed the Pspice System-level simulation.⑤. Researched on the overall process, the thesis gave the process chart and request of the Micromation F-P cavity Array Spectral Detector, then used tanner to design layout of 8 cells detector and readout circuit by adopting MOSIS/ORBIT 2.0U SCNA. We carried out DRC, extraction, post layout simulation, and proved validity of the layout.