The Research Of RF Discharged Oxygen Plasma

The potential of applications in military affairs, industry and medical affairs of an oxygen-iodine laser was claimed to be very high because of its high-power output, high efficiency, good performance for transmission in the air and the opportunity of using low loss optical fibers for delivery of the laser radiation. At present the chemical oxygen-iodine lasers is utilizing the chemical reaction to produce singlet delta oxygen, which has many shortages and would be replaced. In recent years, efforts have been made to investigate the development of new singlet delta oxygen generators which are all gas phase. This paper introduced the theoretic and experimental research on characteristic of oxygen plasma in RF discharged singlet delta oxygen generator.In this paper, the characters of RF discharged oxygen plasma are investigated by the method of Frost and Phelps where the Boltzmann transport equation is solved to obtain the electron energy distribution. The influence of E/N values and frequency to electron distribution functions has been discussed. Calculations have been made of electron drift velocity, diffusion coefficients, ionization and attachment coefficients in gas mixtures for ratios O2:Ar:He of 1:0:2, 1:2:4, 1:1:8, and 1:5:30, curves are presented of them for E/N values and E/N values of stable discharge are gained. The percentage of the input electrical power which excites inelastic processes coupled to singlet delta oxygen is given as a function of E/N and E/N values of the largest percentage gained.Electron temperature has been measured by double probe method in this paper. With researches on different conditions of dilution, pressure, RF pulse width and so on, the influences of those have been found. The electron temperature goes down with the increasing pressure, goes up with the widening pulse width, and can be effectively reduced by adding Ar or He.