Research On Nano-scale Thin Film Buckling 3D Measurement

The paper studies on the 3D appearance of thin film buckling on nano-scalelevel. Recently, parameters for getting free surface with high-precision become keyfactors in product design of aerospace or die industry. Among all the advancedtechniques, measuring 3D appearance is always a vital realm in researches. Althoughmeasurements on relatively larger-size objects'3D appearance have become mature,the particular circumstances in measuring appearance on nano-scale process seemsserves as an obstacle. Hence, researches on this dimension has significant advantagesfor future industry promotion.Using an optic microscope, this research focuses on observing and measuringthe appearance of buckling engendered by 150nm Ti-film material precipitated in thefoundation base of organic glass under the mixed influence from remnant stress andapplied axial load. The researcher designs particular approaches for measuring micro3D appearance, including optic wedge on stepping horizontal displacement approachand micro mechanic vertical displacement approach. In the previous approach, byusing optic wedge to render false image for an object first, the researcher changesdistance by manipulating distance of the false image and develops gear-driveequipment on optic wedge level. While in the latter one, foil-gage cantileverframework and micrometer are both used to change distance through stepsmeasurementonverticaldisplacementofmicroscrope'slens.The research promotes the measurement on displacement of thin film bucklingon nano-scale level, which is based on focusing-evaluation-function theory, Gaussianinterpolation and other theories related to digital image. By proffering relevantformula mentioned above and bydeveloping program with digital-image method, thispaper also applies such theories to practices in measuring 3D appearance. After thecompare on different measuring results and data from different focusing evaluationfunctions, researcher establishes an error analysis and his own opinions on the natureof such functions,in addition to their different applied conditions.Admittedly, limitation on experiment equipment and other research conditions renderobstacles, and thusly we only focus on the measurement on the 3D appearance ofbuckling engendered by 15 nm -thick thin film. As to the measurement ondisplacement of buckling less than 1μm,this research could hardly be applied equally or successfully. The key factor for obtaining more precise data is to limit the stepschanges of distance less than 1μm,which is,unfortunately, unattainable.To sum up, this research make promotion in measurement on 3D appearance ofthin film buckling on nano-scale level.The innovation in experiment approach and theexploration in arithmetic theories on this sphere would help future scientificresearches on similar dimension.