Study On Surface Acoustic Wave Accelerometer

Surface Acoustic Wave was discovered in 1880s by the British physicist Rayleigh. Along with SAW technology developing people began to utilize SAW (Surface Acoustic Wave) device to develop and research new sensor in 1980s. SAW accelerometer is a kind of high performance, low-cost SAW sensor researched by many countries in recent years. As a kind of high sensitive inertial sensor, SAW accelerometer is worth being studied. It is significative not only in theory but also in engineering.The disadvantage on SAW accelerometer with cantilever beam is analyzed and some engineer improvement plans are discussed. The achievements on the SAW accelerometer are showed below in detail:1. A new system design about SAW accelerometer with cantilever beam is fulfilled. It not only heightens the SAW accelerometer sensitivity and veracity, but also improves its performance.2. As the differential scheme of SAW accelerometer is improved, the temperature disturbance to SAW accelerometer is controlled. Another advantage of the new machinery of the SAW accelerometer with cantilever beam is to reduce the technological requirement of SAWR.3. The dynamics response characteristic of the SAW accelerometer differential frequency output is discussed in the step function acceleration impulse. The work changes the situation on the lack of theoretical research in the SAW accelerometer dynamics characteristic research, and enriches the theory of SAW accelerometer with cantilever beam.4. The function on judging the direction of acceleration is added to traditional SAW accelerometer by the band characteristic of surface acoustic wave filter (SAWF). Furthermore the new SAW accelerometer system gets the ability to adjust measurement range and sensitivity in time with measuring acceleration, as result of utilizing the electronic force and the acceleration direction judgment SAWF in the parallel-plate capacitor. 5. The paper designs the double-grid MOSFET mixer circuit. It carries on the simulation analysis to it with Pspice and the simulated results are accord with the theories perfectly. The filter and the frequency are proposed the measurement plan on the foundation of simulation analysis.