The Research On Single Chip Dual Inertial Integrated Device

This paper is mainly on the navigation key components of small / micro / nano satellite ----inertial devices. Firstly, the two types of parameters of monolithic integrated testing technology, combined with the micromation technology of storage testing were researched, and the ultimate object is to achieve Micro Single-chip Inertial Measurement Unit (MIMU) and its system integration and testing. The application of this device will be in micro/nano satellites and its small size, light weight, small power consumption, high reliability and low cost will be fully exerted. Therefore, a kind of single chip integrated inertial sensor based on the micro inertial technology, which can realize linear and angular velocity detection in same direction using only a mass, was raised in this thesis. The development of this technology will give wide road for self-control of micro/nanao satellites. In the mean time, this technology can be applied not only in orientation and attitude control system of small/micro/nano satellites, but also can be applied in the automotive inertial System and other navigation systems fields.This paper is mainly on the invention of a single-chip dual inertia integrated device based on MEMS. The structural design, fabrication process and the processing flow of this device was manufactured. The dynamics model of the sensor was established and the calculating method of the model was given out. Next, the structure which is decoupling and capacitance detection of the sensor is designed and researched according to the model, and relevant simulation on the model was made by relative software, and the simulation results were constant with the principle results. The processing and layout of the sensor, which take protective measures because of every negative effect in the process of etching, were designed. The integrated sensor was fabricated following the processing, and the chips were packaged when it was fabricated. The linear speed circuit was designed and its linearity was test. After debugging the circuit with this sensor, outputs of the circuit in steady-state were obtained. The open-loop angular velocity drive circuits were designed, while the detection circuit using sensitive phase demodulator method was worked out too. The primary testing of the sensor was carried out and testing results was relatively perfect. On the basis of the research above, the formation and elimination methods of coupling and error of the sensor were made out, which summed up the types,causes of coupling and errors. The methods to reduce and eliminate the coupling and Error of the sensor were presented.