Electric Design And Produce Of The Major Diameter NC Vertical Cylindrical Grinder

The major diameter NC vertical cylindrical grinder in this dissertation is designed and researched as a low cost, full automatic equipment which is according to development trend of semiconductor, and aims at that there is no grinder exclusive use of grinding the major diameter of semiconducting crystal material such as gallium arsenide or monocrystal line silicon, with high-precision in China. At first, explaining the electric principle accord with the equipment's characteristic of mechanism agent structure and operation principle, making main technical indicators. Then proceeding electric design and module of electric system control circuit. Through calculating and comparative analysis every parameters of motor and servo-operated system, selecting the type of servo system. Accord with setting up special system parameters, makes the performance of this system fully satisfy the technical indicator demand. Designing software and hardware of IPC angular position of system as control demand of semiconductor processing technology, the 4th–axi is made having double function of the second spindle and angular servo control system, and can automatic switchover according to programmed instruction. Through adding the 4th-axis, this equipment's NC system have four spindle link function of X,Y,X and 4th aixs, designing of this spindle control system provides steady, reliable system for follow-up developing larger diameter grinder. At last, through grinding test of sample and detecting certificate of every technical indicator, the device conforms to testing item and content that designated in technical indicator,secceed in developing of this device fills the domestic gaps. The equipment has been manufactured for more one year, and exported to NeosemiTech Corporation in Korea to grind monocrystal line silicon.