Study And Fabrication Of Hybrid Integrated Balanced I-Q Vector Modulator

The vector modulator plays an increasingly important role in modern communication systems. The research work about vector modulator started in the 1980s in western countries and has achieved advanced technology. Since domestic scholars have only just stared research in this field, papers about vector modulator are rare, so the job done in this dissertation is pioneering.This paper is so far the first one to lunch research into vector modulators in our country. It is the first time that the operation principle and design method of vector modulators are investigated and relevant experimental work is done. Moreover, it is the first to propose the concept of realizing vector modulator on high-resistivity silicon substrates through hybrid integration techniques. This paper shows the prospects of realizing vector modulators at rather low cost relative to MMIC techniques by taking advantages of mature silicon processes.This paper begins with operation principles of alternative types of vector modulators, the theory of vector modulator, and the design methods for them. Then two balanced I-Q vector modulators working at X-band and K-band respectively are designed and fabricated on Rogers5880 substrate and high-resistivity silicon wafer respectively. The dissertation consists mainly of the following parts:1. Introducing the role played by vector modulator in modern communicationsystems.2. Analyzing the theory of vector modulator, the operation principle of alternative types of vector modulators and the design methods for them.3. Discussing the theoretical basis of balanced I-Q vector modulator and design consideration for two balanced I-Q modulators fabricated on Rogers5880 substrate and high-resistivity silicon wafer as well as simulation results.4. Fabricating on and testing of the vector modulators and analyzing the measured results and discussion of the approaches to improve the circuit performance.