A Phase Generated Carrier Based Nano-displacement Sensor For High-resolution Accelerometer

Nowadays, accelerometers have got a very big market, which covers the fields of automobile, aeroplane and homing for military. However, accelerometers designed in traditional way can't satisfy the request for good resolution, big dynamic range, highly integration and low cost. In order to improve those characteristics, we designed a PGC based nano-displacement sensor for high resolution accelerometer. Starting from the research on accelerometer, displacement sensor, and the related programming, we have done the following work:First, further understanding and researching of the accelerometer related knowledge have been done, also a conclusion of existing fabrication technologies of accelerometers and a prediction of their trend in development. Beside that, we did an analysis on the advantages and disadvantages of many kinds of accelerometers; we also discussed the primary problems in fabrication technology. All this put the design of PGC based nano-displacement sensor for accelerometer of high resolution in a good direction.After that, displacement system of many kinds of sensitive masses and detect system have been studied, there were theoretical analysis. We also have studied the principles of adjustable capacitive accelerometer and optical accelerometers of amplitude modulation and phase modulation. Principles of displacement measuring by Michelson, Mach-Zehnder and Fabry-Perot interferometers have been the key subjects. This has made a good foundation for our work.Then, many kinds of demodulation technologies of fiber based accelerometers have been studied, among which the one based on phase generated carrier was the key subject. Through that we made the blue print and discussed it theoretically to ensure its possibility.Last but not the least, after the studying of C ++, based on the theories above, we did the programming of application on signal processing. We validated our design experimentally. Through the data analysis of the experiment, we have come to know that the accelerometer designed this way can obtain displacement value in the resolution of nanometer with the total length in millimeter and its dynamic rangecould reach 10~6.