Motion Control System Design Of A High Speed Precision Positioning Platform For IC Package

Aimed at a two DOF high speed and high precision positioning table for IC packaging, this dissertation deals with the control strategies to enhance its speed and precise are presented. As a result, a prototype machine of XY table has been developed. The following creative works have been completed.A voice coil actuator direct-drive high speed and high precision XY table patented has been developed. A new flexible decoupling mechanism is proposed to use in the table. So the driving element can be mounted on the base and the moving inertia has been reduced. Meanwhile, the table is of conventional XY precision table kinematics decoupling characteristic.Considering the precision positioning table as lumped mass spring system, the dynamic model of X axial table and Y axial table has been developed respectively. The analytic solution of displacement step responses and displacement impulse responses of the X axial table and Y axial table have been given by use of Laplace transform method. The dynamic model of the linear voice coil actuator is formulated, too. The above outcomes the electro mechanical coupling control system of the positioning table.Based on the electro mechanical coupling control system of the positioning table, the minimum deadbeat response controlling algorithm is introduced to the control system to reduce the mechanical resonance at high acceleration and deceleration rates. From the result of the simulation and experiment, the positioning system used the above control algorithm has a favorable dynamic and static characteristic and robust.The Laser calibration system is put up to finish the experiment to get the capability parameter of the table.The above outcomes have been used for the development of a prototype machine of XY table. The XY table with high positioning accuracy and high dynamic performance also can reach very high speed and acceleration. The prototype machine has been checked and accepted by the expert committee of The National High Technology Research and Development Program of China (863 Program).