The Research On Piezoelectric Pump With Active Valve Actuated By Piezoelectric Wafer

People has studied and developed piezo-pump for more twenty years,many different structures of it has been made ;such as from piezoelectric actuated peristaltic pump to pies-acoustic pump,from single-chamber pump to multi-chamber pump,from valve piezo-pump to valveless pump,from check valve piezo pump to active valve pump. In this paper, a new kind piezo-pump with active valve was put forward .1.introductionIntroducted the status of study about piezo-pump at home and abroad, showed the structure's characters and working principle. The trends of piezo-pump's development were analysed: High output pressure,High flow rate,Micro-structure,Low power consumption. At present ,there are somethings to be done: reappearance of output,long life and simple using method .2. The basic theory of piezoelectric materialAs the basic components, as well as electrical energy conversion components, the performance of piezoelectric ceramic components determines the performance of piezoelectric active valve. The basic concept of the piezoelectric effect, the basic physical properties of the piezoelectric material and the important performance parameters. Four kinds of piezoelectric equations were introduced. The vibration modes, the equivalent circuit resonance characteristics were analyzed. The theory on the basis of piezoelectric actuators was expounded.3. The research on the characteristics of the piezoelectric cantilever beam actuated active valveProposed one kind of application piezoelectric bimorph makes active valve, and Mainly has analyzed this active valve key component- piezoelectric double-wafer. According to the expressions, we present the relations of the actuator's performance and its structure, applied voltage, materials, and so on. In this paper, we have used the finite element method to analysis the piezoelectric actuator, and compared with the experiment results. The testing results turn out that testing, theory calculation and FEM analysis are basically conformable.4. The research on the characteristics of the round piezoelectric actuated active valve After the testing of deformation, the following conclusions were drawn: controls the active valve with the rectangular wave the piezoelectric actuator; controls the pump cavity with the sine wave the piezoelectric actuator. Through piezoelectric actuator radial direction distortion experiment, Obtained the piezoelectric actuator distortion to be allowed approximately to regard as the parabola, Provides the basis for the next chapter of solution volumetric efficiency. The application round piezoelectric actuator has designed three kinds of structures active valves, Chooses a better plan. And use FEM design parameter w and hv to active valve influence, for the next step of design piezo-pump with active valve to make the preparation.5. The piezo-pump with active valve the theory and experimental studyDesign a round piezoelectric actuated piezo-pump with active valve, Elaborated its principle of work. according to different valve port position, the qualitative analysis axial and radial direction flows when pumps in the cavity the fluid pressure distributed rule. Through experiment and theoretical calculation, estimated the piezo-pump with active valve the volumetric efficiency, the preliminary analysis has caused the volumetric efficiency not high reason. Has manufactured several kind of different sizes piezo-pump, Analyzes valve port thickness w and valve port gap hv to presses the piezo-pump output performance the influence6 .ConclusionThe chapter gives the main conclusion obtained in this paper and the prospect for next research.