Study On Measurement System Analysis For Special Measurement Process

This paper firstly gives an introduction to the basic concepts of Measurement System Analysis(MSA). Secondly, on the basis of Repeatability and Reproducibility(R&R) analysis to the classical Measurement System, the appraising methods to a non-classical Measurement System have also been addressed, and the paper discusses the test method to the model's fitness. Finally this paper discusses Measurement System Variance Range (MSVR) based on a small number of observers.The following has been studied in this paper:(1) The purposes, elements, basic concepts, preparation and research status quo of MSA have been discussed.(2) On the basis of R&R analysis to the classical Measurement System, this paper introduces two methods, Range Method and Analysis of Variance(ANOVA).(3) Based on a special measurement process in industry, the paper presents a cross-nested model for measurement system analysis, and calculates variance components of each source in the measurement system repeatability and reproducibility analysis by using analysis of variance and variance components estimate.(4) In view of the assumptions of normal distribution, equal variance, and independence, the residual chart is applied and used to test the model's fitness.(5) On the basis of establishing MEM, analyzing MSVR of MEM, and educing a estimator of the width of MSVR of MEM, the paper discusses the estimator of width of MSVR of MEM, and elicits the relation between observer number, effects and estimating bias; compares the width of MSVR of MEM with the width of MSVR of REM, and elicits the relation between the size of the width and observer number, effects; finally discusses the applying conditions of the two width expressions along with observer number changing.In the end, the author puts the above study into the practice of a Semiconductor Company , and yields good results.