Study On Polymer Waveguide Integrated Cirtcuits For Micro-opto-mechanical Vibration Sensors

Being juxtaposed with communication and computer technologies, sensor technology has been deemed as one of three mainstays of communication technology in modern time. With the development of modern science, sensor technology, as a new subject related closely with modern science, has been developing rapidly. Sensor technology is being applied wider and wider in industry automatization, measurement and detection technology, spaceflight technology, military engineering, and diagnosis of medical treatment. In the same time, sensor technology has the function to accelerate developments of every subject.One of characteristics of the micro sensors is their small bulk. The size of their sensing element commonly is the micrometer grade, and they made by the technique of micro-mechanical process, which include Photolithography, Etching, Deposition, Bonging and Encapsulation. Making use of the Anisotropy Etching, Sacrificial Layer Technology, LIGA (Lithographie, Galvanoformung and Abformung) Process, we can fabricate three dimension micro structures with the large difference between the layers, which include movable membranes, cantilever beams, bridges, grooves, holes, and cones. Combining with the special films and high performance integrated circuits, these micro structures have been applied to fabricate various sensors even sensing element arrays with multi-performance (such as optic-electro detectors), and realized pressure, force, acceleration, angle velocity,...